Computer modeling of single-layer nanocluster formation in a thin SiO2 layer buried in Si by ion mixing and thermal phase decomposition
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2019
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.5096451